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ULTRA HIGH PURITY GAS FILTER
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IDR 1000.00

Specification of

Ultra High Purity Gas Filter

To meet the requirements of SEMI E -96 49.8, the
UNILOK GF Series gas fiter is optimized for gas
filtering applications.
UNILOK GF Series is made up of ot 316 l VAR stainless steel sintered filter housing and construction that will be best sloution for UHP application.

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